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The Role of AlN Encapsulation of GaN During Implant Activation Annealing

Author(s):
Zolper, J.C.
Pearton, S.J.
Rieger, D.J.
Baca, A.G.
Lee, J.W.
Vartulli, C.R.
Stall, R.A.
2 more
Publication title:
Proceedings of the Symposium on High Speed III-V Electronics for Wireless Applications and the twenty-fifth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXV)
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-15
Pub. date:
1996
Page(from):
244
Page(to):
248
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771658 [156677165X]
Language:
English
Call no.:
E23400/963435
Type:
Conference Proceedings

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