Blank Cover Image

Plasma-Induced-Damage of GaN

Author(s):
Shul, R.J.
Zolper, J.C.
Hagerott Crawford, M.
Hickamn, R.J.
Briggs, R.D.
Pearton, S.J.
Lee, J.W.
Karlicek, R.F., Jr.
Tran, C.
Schurman, M.
Constantine, C.
Barratt, C.
7 more
Publication title:
Proceedings of the Symposium on High Speed III-V Electronics for Wireless Applications and the twenty-fifth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXV)
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-15
Pub. date:
1996
Page(from):
232
Page(to):
243
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771658 [156677165X]
Language:
English
Call no.:
E23400/963435
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings ECR, ICP and RIE plasma etching of GaN

Shul, R.J., McClellan, G.B., Rieger, D.J., Hafich, M.J., Drummond, T.J., Pearton, S.J., Abernathy, C.R., Constantine, …

Electrochemical Society

7 Conference Proceedings ICP Etching of GaAs Via Hole Contacts

Shul, R.J., Baca, A.G., Briggs, R.D., McClellan, G.B., Pearton, S.J., Constantine, C.

Electrochemical Society

Shul, R.J., Zhang, L., Baca, A.G., Willison, C.G., Han, J., Pearton, S.J., Ren, F., Zolper, J.C., Lester, L.F.

Materials Research Society

Lee, J.W., Pearton, S.J., Zolper, J.C., Stall, R.A.

Electrochemical Society

Constantine, C., Johnson, D., Barratt, C., Shul, R. J., McClellan, G. B., Briggs, R. D., Rieger, D. J., Karlicek, R. F., …

MRS - Materials Research Society

Vartuli, C. B., Pearton, S. J., Abernathy, C. R., Shul, R. J., Kilcoyne, S. P., Crawford, M. Hagerott, Howard, A. J., …

MRS - Materials Research Society

4 Conference Proceedings Chlorine-Based Plasma Etching of GaN

Shul, R. J., Briggs, R. D., Pearton, S. J., Vartuli, C. B., Abernathy, C. R., Lee, J. W., Constantine, C., Barratt, C.

MRS - Materials Research Society

Grieshaber,W., Schubert,E.F., Karlicek,R.F.,Jr., Schurman,M.J., Tran,C.

SPIE-The International Society for Optical Engineering

Pearton, S.J., Vartuli, C.B., Shul, R.J., Zolper, J.C.

Electrochemical Society

Vartuli, C. B., Pearton, S. J., Abernathy, C. R., MacKenzie, J. D., Shul, R. J., Zolper, J. C., Lovejoy, M. L., Baca, A. …

MRS - Materials Research Society

Pearton, S.J., Ren, F., Shul, R.J., Zolper, J.C.

Electrochemical Society

Baca, A.G., Sherwin, M.E., Zolper, J.C., Shul, R.J., Briggs, R.D., Heise, J.A., Robertson, P.J., Hafich, M.F.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12