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Epitaxial Growth of Void-Free 3C-SiC Thin Film on Si Substrate

Author(s):
Seo, Y.H.
Nahm, K.S.
Suh, F.K.
Lee, H.J.
Kim, D.
Lee, B.
1 more
Publication title:
Proceedings of the Symposium on High Speed III-V Electronics for Wireless Applications and the twenty-fifth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXV)
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-15
Pub. date:
1996
Page(from):
219
Page(to):
231
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771658 [156677165X]
Language:
English
Call no.:
E23400/963435
Type:
Conference Proceedings

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