Blank Cover Image

Whole-Wafer Plasma Damage Evaluation

Author(s):
Hoff, A.M.
Lagowski, J.
Nauka, N.
Esry, T.C.
Edelman, P.
Jastrzebski, L.
1 more
Publication title:
Proceedings of the Fourth International Symposium on High Purity Silicon
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-13
Pub. date:
1996
Page(from):
544
Page(to):
553
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771566 [1566771560]
Language:
English
Call no.:
E23400/963433
Type:
Conference Proceedings

Similar Items:

Lagowski, J., Hoff, A., Jastrzebski, L., Edelman, P., Esry, T.

MRS - Materials Research Society

Lagowski, J., Edelman, P.

Electrochemical Society

Edelman,P., Savchouk,A., Wilson,M., Jastrzebski,L., Lagowski,J.J., Nauka,K., Ma,S., Hoff,A.M., DeBusk,D.K.

SPIE-The International Society for Optical Engineering

Sen, S., Hoff, A.M., Moradi, B., Lagowski, J., Jastrzebski, L.

Electrochemical Society

P. Edelman, A.M. Hoff, L. Jastrzebski, J. Lagowski

Society of Photo-optical Instrumentation Engineers

Edelman,. Piotr, Lagowski, Jacek, Jastrzebski, Lubek

Materials Research Society

Edelman, P., Lagowski, J., Savchouk, A., Hoff, A., Jastrzebski, L., Persson, E.

MRS - Materials Research Society

Kontkiewicz, A. M., Lagowski, J., Dexter, M., Edelman, P.

MRS - Materials Research Society

Jastrzebski,L., Edelman,P., Lagowski,J.J., Hoff,A.M., Savchouk,A., Persson,E.

SPIE-The International Society for Optical Engineering

Stevie, F.A., Persson, E., DeBusk, D.K., Savchuk, A., Hoff, A.M., Edelman, P., Lagowski, J.

Electrochemical Society

Faifer, V., Edelman, P., Kontkiewicz, A., Lagowski, J., Hoff, A., Dyukov, V., Pravdivtsev, A., Kornienko, I.

Electrochemical Society

Stevie,F.A., Persson,E., DeBusk,D.K., Savchuk,A., Hoff,A.M., Edelman,P., Lagowski,J.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12