The Impact of Crystal Quality by Delineation of COP and the Impact on the Silicon Wafer Surface

The Impact of Crystal Quality by Delineation of COP and the Impact on the Silicon Wafer Surface

Author(s):

Graef, D.

Publication title:

Proceedings of the Fourth International Symposium on High Purity Silicon

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

96-13

Pub. Year:

1996

Page(from):

117

Page(to):

131

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771566 [1566771560]

Language:

English

Call no.:

E23400/963433

Type:

Conference Proceedings

Details

TDL ID:	ZA00013846
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on High Purity Silicon ; Meeting of the Elecrochemical Society
Conf. info. (Number):	4th ; 190h
Conf. info. (Venue):	San Antonio, Texas, USA
Conf. info. (Date):	1996.10.06-1996.10.11

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