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Investigation of SOG Etchback Uniformity in MxP+ with ESC

Author(s):
Bjorkman, C.H.
Fong, H.
van der Reijden, M.J.
Shan, H.
Welch, M.
Fischback, K.A.
1 more
Publication title:
Proceedings of the eleventh International Symposium on Plasma Processing
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-12
Pub. Year:
1996
Page(from):
531
Page(to):
535
Pages:
5
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771641 [1566771641]
Language:
English
Call no.:
E23400/962354
Type:
Conference Proceedings

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