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Ion Current Flux and Ion Energy Distribution Studies of the DPS Metal Etch Source

Author(s):
Loewenhardt, P.K.
Hanawa, H.
Ma, D.X.
Salzman, P.
Chuc, K.
Sato, A.
Todorov, V.
Yin, G.Z.
3 more
Publication title:
Proceedings of the eleventh International Symposium on Plasma Processing
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-12
Pub. Year:
1996
Page(from):
234
Page(to):
241
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771641 [1566771641]
Language:
English
Call no.:
E23400/962354
Type:
Conference Proceedings

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