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Enhanced Pulsed Plasma Operation by Suppressing Side Band Modes

Author(s):
Chi, K.K.
Hahm, J.H.
Shin, K.S.
Shin, H.S.
Jung, C.O.
Koh, Y.B.
Lee, M.Y.
2 more
Publication title:
Proceedings of the eleventh International Symposium on Plasma Processing
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-12
Pub. date:
1996
Page(from):
96
Page(to):
105
Pages:
10
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771641 [1566771641]
Language:
English
Call no.:
E23400/962354
Type:
Conference Proceedings

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