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III-Nitride ion implantation and device processing

Author(s):
Zolper, J.C.
Shul, R.J.
Baca, A.G.
Pearton, S.J.
Abernathy, C.R.
Wilson, R.G.
Stall, R.A.
Shur, M.
3 more
Publication title:
Proceedings of the First Symposium on III-V Nitride Materials and Processes
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-11
Pub. date:
1996
Page(from):
149
Page(to):
158
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771634 [1566771633]
Language:
English
Call no.:
E23400/962353
Type:
Conference Proceedings

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