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Ion implantation processing of GaN epitaxial layers

Author(s):
Tan, H.H.
Williams, J.S.
Zou, J.
Cockayne, D.J.H.
Pearton, S.J.
Yuan, C.
1 more
Publication title:
Proceedings of the First Symposium on III-V Nitride Materials and Processes
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-11
Pub. Year:
1996
Page(from):
142
Page(to):
148
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771634 [1566771633]
Language:
English
Call no.:
E23400/962353
Type:
Conference Proceedings

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