Fabrication and Characterization of a-SiNx:H Alloys by PECVD Using N2 and SiH4
- Author(s):
- Publication title:
- Proceedings of the Thirteenth International Symposium on Chemical Vapor Deposition
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 96-5
- Pub. Year:
- 1996
- Page(from):
- 496
- Page(to):
- 503
- Pages:
- 8
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771559 [1566771552]
- Language:
- English
- Call no.:
- E23400/962104
- Type:
- Conference Proceedings
Similar Items:
Electrochemical Society |
Electrochemical Society |
2
Conference Proceedings
Modelling of Aluminum Enhanced Crystallization in Hydrogenated Amorphous Silicon(a-Si:H)
SPIE - The International Society for Optical Engineering |
8
Conference Proceedings
RECENT OBSERVATIONS OF MICROCAVITIES IN CVD DIAMOND: THEIR EFFECTS ON MCM PROCESSING
Electrochemical Society |
3
Conference Proceedings
DEPOSITION OF FLUORINATED SILICON NITRIDE USING PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION TECHNIQUE
Materials Research Society |
Electrochemical Society |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
Electrochemical Society |
6
Conference Proceedings
A Highly Adhesive Gold-Based Metallization System for CVD Diamond Substrates
Electrochemical Society |
12
Conference Proceedings
A Novel Process for Planarizing CVD-Diamond Substrates for MCM Application
Society of Photo-optical Instrumentation Engineers |