Monitoring of the Gas Phase Composition in Si CVD Using FTIR and QMS
- Author(s):
- Publication title:
- Proceedings of the Thirteenth International Symposium on Chemical Vapor Deposition
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 96-5
- Pub. Year:
- 1996
- Page(from):
- 201
- Page(to):
- 206
- Pages:
- 6
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771559 [1566771552]
- Language:
- English
- Call no.:
- E23400/962104
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
In-Situ FTIR Study on the Role of Surface Hydrides and Fluorides in Low-Temperature Si-CVD
Electrochemical Society |
SPIE - The International Society for Optical Engineering |
Electrochemical Society |
Trans Tech Publications |
Electrochemical Society |
SPIE - The International Society of Optical Engineering |
Electrochemical Society |
10
Conference Proceedings
Auto-focus control and weld process monitoring of laser welding using chromatic filtering of thermal radiation (Invited Paper)
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Effect of Slag Compositions on the Extraction of Metallic Components from the Used PCB
Trans Tech Publications |
11
Conference Proceedings
Temperature-Programmed Desorption Study on the Decomposition Mechanism of Ti (OC3H7)4 on Si (100)
Electrochemical Society |
6
Conference Proceedings
Patterning microconductor using nanosecond laser ablation of metal nanoparticle film
SPIE - The International Society of Optical Engineering |
12
Conference Proceedings
Use of open-path FTIR monitoring for emission rate assessment of industrial area sources during winter conditions
SPIE - The International Society for Optical Engineering |