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An Accurate Monte Carlo Binary Collision Model for BF2 Implants into (100) Single-Crystal Silicon

Author(s):
Yang, S.-H.
Morris, S.
Tian, S.
Morris, M.
Parab, K.
Obradovich, B.
Tasch, A.
2 more
Publication title:
Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-4
Pub. Year:
1996
Page(from):
481
Page(to):
495
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771542 [1566771544]
Language:
English
Call no.:
E23400/961823
Type:
Conference Proceedings

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