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Properties of Silicon Point Defects as Revealed by Lithium Ion Drifting

Author(s):
Knowlton, W.B.
Walton, J.T.
Lee, J.S.
Lewak, D.
Wong, Y.K.
Haller, E.E.
1 more
Publication title:
Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-4
Pub. Year:
1996
Page(from):
324
Page(to):
336
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771542 [1566771544]
Language:
English
Call no.:
E23400/961823
Type:
Conference Proceedings

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