Three-Dimensional Oxidation Simulation with Elasto-Viscoplastic Model

Three-Dimensional Oxidation Simulation with Elasto-Viscoplastic Model

Author(s):

Publication title:

Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

96-4

Pub. Year:

1996

Page(from):

228

Page(to):

236

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771542 [1566771544]

Language:

English

Call no.:

E23400/961823

Type:

Conference Proceedings

Details

TDL ID:	ZA00013837
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Process Physics and Modeling in Semiconductor Technology ; Spring Meeting of the Electrochemical Society
Conf. info. (Number):	4th ; 1996
Conf. info. (Venue):	Los Angeles, California, USA
Conf. info. (Date):	1996.05.05-1996.05.10

Similar Items:

1 Conference Proceedings Three-Dimensional Monte Carlo Simulation of Implanted Boron and Damage Distribution in Crystalline Silicon Considering Mask Structure Son, M.-S., Lee, J.-H., Byun, K.-R., Hwang, H.-J. Electrochemical Society	7 Conference Proceedings Three-Dimensional Simulation of Thermal Oxidation and the Influence of Stress C. Hollauer, H. Ceric, S. Selberherr Electrochemical Society
2 Conference Proceedings Mathematical Modeling of Three-Dimensional Die Flows of Viscoplastic Fluids with Wall Slip Lawal, A., Railkar, S., Kalyon, D. M. Society of Plastics Engineers, Inc. (SPE)	8 Conference Proceedings Volumetric three-dimensional display using projection CRT Lee, J. D., Jang, H. W., Nam, H., Song, M. S., Kim, B. S., Oh, Y. S. SPIE-The International Society for Optical Engineering
3 Conference Proceedings Application of substructuring method to three-dimensional optical lithography simulation Lee,S.G., Seo,C.-K., Lee,D.-H., Lee,J.-U., Cho,M. SPIE-The International Society for Optical Engineering	9 Conference Proceedings Comparison between Self-Consistent and Intermediate Approaches for the Simulation of Large Deformation Polycrystal Viscoplasticity S. M'Guil, S. Ahzi, H. Youssef, J. Gracio, M.A. Khaleel Trans Tech Publications
4 Conference Proceedings Three-dimensional scanning optical tweezers [6048-04] Hwang S.-U, Park I. -Y, Song J.-H, Lee Y. -G, LeBrun T., Dagalakis N., Gagnon C., Balijepali A. SPIE - The International Society of Optical Engineering	10 Conference Proceedings Three-dimensional simulation of sacrificial etching J. Cervenka, H. Ceric, S. Selberherr SPIE - The International Society of Optical Engineering
5 Conference Proceedings A Three-Dimensional Monte Carlo Model for Phosphorus Implants Into (100) Single-Crystal Silicon Son, Myung-Sik, Hwang, Ho-Jung MRS - Materials Research Society	11 Conference Proceedings Optical design and analysis for super multiview three-dimensional imaging system Kim,S.-S., Sohn,K.-H., Savaljev,V., Pen,E.F., Son,J.-Y., Chun,J.-H. SPIE-The International Society for Optical Engineering
6 Conference Proceedings Shape Memory Alloy (SMA) Actuator Based Separation Device M.-h. Lee, J.H. Son, H.S. Hwang ESA	12 Conference Proceedings Synthesis of Ceria-Coated Copper Oxide Particles for Direct Hydrocarbon SOFCs Anode Lee, J., Lee, S., Lee, E.A., Hwang, H.J. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12