Blank Cover Image

Nitridation Enhanced Diffusion of Antimony in Bulk and Silicon-on-Insulator Material

Author(s):
Publication title:
Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-4
Pub. date:
1996
Page(from):
54
Page(to):
63
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771542 [1566771544]
Language:
English
Call no.:
E23400/961823
Type:
Conference Proceedings

Similar Items:

Crowder, S. W., Griffin, P. B., Plummer, J. D.

Electrochemical Society

Ural, A., Griffin, P. B., Plummer, J. D.

MRS - Materials Research Society

Crowder, S.W., Griffin, P.B., Plummer, J.D.

Electrochemical Society

Griffin, P.B., Plummer, J.D.

Electrochemical Society

Griffin, P.B., Plummer, J.D.

Materials Research Society

Griffin, P. B., Plummer, J. D.

Electrochemical Society

Sahiner, M. Alper, Novak, Steven W., Woicik, Joe C., Takamura, Yayoi, Griffin, Peter B., Plummer, James D.

Materials Research Society

Perozziello, E.A., Griffin, P.B., Plummer, J.D.

Electrochemical Society

Fang, Wingra T. C., Griffin, Peter B., Plummer, James D.

MRS - Materials Research Society

Chao, H. S., Griffin, P. B., Plummer, J. D.

MRS - Materials Research Society

Agah, A., Hassibi, A., Plummer, J.D., Griffin, P.B.

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12