TCAD - The Semiconductor Industry Roadmap and a Path to the Future | 東京工業大学附属図書館文献データベース

TCAD - The Semiconductor Industry Roadmap and a Path to the Future

Author(s):: Plummer, J.D.
Publication title:: Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology
Title of ser.:: Electrochemical Society Proceedings Series
Ser. no.:: 96-4
Pub. Year:: 1996
Page(from):: 3
Page(to):: 17
Pub. info.:: Pennington, NJ: Electrochemical Society
ISSN:: 01616374
ISBN:: 9781566771542 [1566771544]
Language:: English
Call no.:: E23400/961823
Type:: Conference Proceedings

Details

TDL ID:	ZA00013837
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Process Physics and Modeling in Semiconductor Technology ; Spring Meeting of the Electrochemical Society
Conf. info. (Number):	4th ; 1996
Conf. info. (Venue):	Los Angeles, California, USA
Conf. info. (Date):	1996.05.05-1996.05.10

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