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Advanced Fabrication Technologies for Nano-Electronics

Author(s):
Simmons, J.A.
Sherwin, M.E.
Weckwerth, M.V.
Harff, N.E.
Eiles, T.M.
Baca, W.E.
Hou, H.
Hammons, B.E.
3 more
Publication title:
Proceedings of the Twenty-fourth State-of-the-Art Program on Compound Semiconductors
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-2
Pub. Year:
1996
Page(from):
186
Page(to):
202
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771528 [1566771528]
Language:
English
Call no.:
E23400/962066
Type:
Conference Proceedings

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