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Dry Etch Development of W/WSi Short Gate MESFETs

Author(s):
Shul, R.J.
Sherwin, M.E.
Baca, A.G.
Zolper, J.C.
Rieger, D.J.
Briggs, R.D.
1 more
Publication title:
Proceedings of the Twenty-fourth State-of-the-Art Program on Compound Semiconductors
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-2
Pub. date:
1996
Page(from):
162
Page(to):
174
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771528 [1566771528]
Language:
English
Call no.:
E23400/962066
Type:
Conference Proceedings

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