Use of Nitrogen As The Ambient in The L.P.-MOVPE of III/V's

Use of Nitrogen As The Ambient in The L.P.-MOVPE of III/V's

Author(s):: Hardtdegen, H.
Publication title:: Proceedings of the Twenty-fourth State-of-the-Art Program on Compound Semiconductors
Title of ser.:: Electrochemical Society Proceedings Series
Ser. no.:: 96-2
Pub. Year:: 1996
Page(from):: 49
Page(to):: 59
Pub. info.:: Pennington, NJ: Electrochemical Society
ISSN:: 01616374
ISBN:: 9781566771528 [1566771528]
Language:: English
Call no.:: E23400/962066
Type:: Conference Proceedings

Details

TDL ID:	ZA00013836
Series ID:	PA00000028
Conf. info. (Name):	SOTAPOCS ; Meeting of the Electrochemical Society
Conf. info. (Number):	24th ; 189th
Conf. info. (Venue):	Los Angeles, CA, USA
Conf. info. (Date):	1996.05.05-1996.05.10

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