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Characterization of (I00)InP after surface passivation as studied by AFM, XPS and SIMS

Author(s):
Maurice, V.
Marcus, P.
Mason, B.
Lu, Z.H.
Gao, L.J.
Sproule, G.I.
Sundersena Rao, T.
Graham, M.J.
3 more
Publication title:
ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
95-30
Pub. date:
1995
Page(from):
253
Page(to):
262
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771221 [1566771226]
Language:
English
Call no.:
E23400/961027
Type:
Conference Proceedings

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