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Investigation of crystal defects in as-grown and processed silicon wafers and heteroepitaxial layers by infrared light scattering tomography

Author(s):
Kissinger, G.
Vanhellemont, J.
Graef, D.
Zulehner, W.
Claeys, C.
Richter, H.
1 more
Publication title:
ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
95-30
Pub. Year:
1995
Page(from):
156
Page(to):
164
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771221 [1566771226]
Language:
English
Call no.:
E23400/961027
Type:
Conference Proceedings

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