Selective Etching of GaAs/AlxGa1-xAs for Heterostructure Field Effect Transistors

Selective Etching of GaAs/AlxGa1-xAs for Heterostructure Field Effect Transistors

Author(s):

Kitano, T.

Publication title:

Proceedings of the Symposium on Wide Bandgap Semiconductors and Devices and the Twenty-Third State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXIII)

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

95-21

Pub. Year:

1995

Page(from):

327

Page(to):

336

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771160 [1566771161]

Language:

English

Call no.:

E23400/961020

Type:

Conference Proceedings

Details

TDL ID:	ZA00013826
Series ID:	PA00000028
Conf. info. (Name):	Symposium on Wide Bandgap Semiconductors and Devices ; SOTAPOCS ; Meeting of the Electrochemical Society
Conf. info. (Number):	1995 ; 23rd ; 188th
Conf. info. (Venue):	Chicago, IL, USA
Conf. info. (Date):	1995.10.08-1995.10.13

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