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Hydrogen Incorporation into III-V Nitrides During Processing

Author(s):
Pearton, S.J.
Shul, R.J.
Wilson, R.G.
Ren, F.
Zavada, J.M.
Abernathy, C.R.
Vartuli, C.B.
Lee, J.W.
Mileham, J.R.
MacKenzie, J.D.
5 more
Publication title:
Proceedings of the Symposium on Wide Bandgap Semiconductors and Devices and the Twenty-Third State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXIII)
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
95-21
Pub. date:
1995
Page(from):
178
Page(to):
186
Pages:
9
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771160 [1566771161]
Language:
English
Call no.:
E23400/961020
Type:
Conference Proceedings

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