Implantation and Annealing of Wide Bandgap Materials

Author(s):

Wilson, R.G.  

Publication title:

Proceedings of the Symposium on Wide Bandgap Semiconductors and Devices and the Twenty-Third State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXIII)

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

95-21

Pub. date:

1995

Page(from):

152

Page(to):

162

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771160 [1566771161]

Language:

English

Call no.:

E23400/961020

Type:

Conference Proceedings