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Status of Ion Implantation Doping and Isolation of III-V Nitrides

Author(s):
Zolper, J.C.
Pearton, S.J.
Abernathy, C.R.
Vartuli, C. B.
Yuan, C.
Stall, R.A.
1 more
Publication title:
Proceedings of the Symposium on Wide Bandgap Semiconductors and Devices and the Twenty-Third State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXIII)
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
95-21
Pub. date:
1995
Page(from):
144
Page(to):
151
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771160 [1566771161]
Language:
English
Call no.:
E23400/961020
Type:
Conference Proceedings

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