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PARTICLE IMPACT ON 7 nm GATE OXIDES

Author(s):
Paillet, C.
Papon, A.M.
Joly, J.P.
Tardif, F.
Levy, D.
Barla, K.
Patruno, P.
2 more
Publication title:
Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
95-20
Pub. Year:
1995
Page(from):
575
Page(to):
580
Pages:
6
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771153 [1566771153]
Language:
English
Call no.:
E23400/962140
Type:
Conference Proceedings

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