Blank Cover Image

CHARACTERIZATION OF SILICON OXIDE ETCHING IN GAS PHASE HF/VAPOR MIXTURES

Author(s):
Muscat, Anthony J.
Lawing, Scott A.
Sawin, Herbert H.
Butterbaugh, Jeff
Syverson, Dan
Hiatt, Fred
1 more
Publication title:
Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
95-20
Pub. Year:
1995
Page(from):
371
Page(to):
378
Pages:
8
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771153 [1566771153]
Language:
English
Call no.:
E23400/962140
Type:
Conference Proceedings

Similar Items:

Muscat, A.J., Lawing, A.S., Xu, H., Sawin, H.H.

American Institute of Chemical Engineers

Jang,W.I., Choi,C.A., Lee,C.S., Hong,Y.S., Lee,J.H., Baek,J.T., Kim,B.W.

SPIE-The International Society for Optical Engineering

Lawing, A. Scott, Muscat, Anthony J., Sawin, Herbert H., Butterbaugh, Jeffrey W.

Electrochemical Society

Froeschle, Barbara, Deutschmann, Lutz, Bauer, Anton J., Burte, Edmund P.

MRS - Materials Research Society

Butterbaugh, J.W., Hiatt, C.F., Gray, D.C.

Electrochemical Society

Chiaroni, J., Grange, H., Pallet, O., Bergman, E.

Electrochemical Society

Han, Y.-P., Lawing, S., Sawin, H.

Electrochemical Society

Witvrouw,A., Bois,B.Du, Moor,P.De, Verbist,A., Hoof,C.A.Van, Bender,H., Baert,K.

SPIE-The International Society for Optical Engineering

Kwon, O., Sawin, H.

Electrochemical Society

Tong, J.K., Martin, J.S., Rogers, T.C., Syverson, D.J.

Electrochemical Society

Jang,W.-I., Choi,C.-A., Lee,C.-S., Hong,Y.-S., Lee,J.-H.

SPIE - The International Society for Optical Engineering

Wei Guo, Hiroyo Kawai, Herbert H. Sawin

American Institute of Chemical Engineers

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12