Electroplating for LIGA Processing

Electroplating for LIGA Processing

Author(s):

Bonivert, W.D.

Publication title:

Proceedings of the Fourth International Symposium on Magnetic Materials, Processes, and Devices : applications to storage and microelectromechanical systems (MEMS)

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

95-18

Pub. Year:

1995

Page(from):

397

Page(to):

406

Pages:

10

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771139 [1566771137]

Language:

English

Call no.:

E23400/961821

Type:

Conference Proceedings

Details

TDL ID:	ZA00013823
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Magnetic Materials, Processes, and Devices ; Meeting of the Electrochemical Society
Conf. info. (Number):	4th ; 188th
Conf. info. (Venue):	Chicago, Illinois, USA
Conf. info. (Date):	1995.10.09-1995.10.12

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