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Critical issues in SiGe on thin film silicon on sapphire for high performance room temperature CMOS technology

Author(s):
Dubbelday, W B
On, J
Lagnado, I
Kavanagh, K
Walker, H
Chu, J
Meyerson, B
2 more
Publication title:
Proceedings of the Seventh International Symposium on Silicon-on-Insulator Technology and Devices
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-3
Pub. date:
1995
Page(from):
237
Page(to):
247
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771535 [1566771536]
Language:
English
Call no.:
E23400/962142
Type:
Conference Proceedings

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