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Quality innovation of SIMOX wafers by low dose and high temperature oxidation techniques

Author(s):
Tachimori, M
Masui, S
Nakajima, T
Kawamura, K
Hamaguchi, I
Yano, T
Nagatake, Y
2 more
Publication title:
Proceedings of the Seventh International Symposium on Silicon-on-Insulator Technology and Devices
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-3
Pub. date:
1995
Page(from):
53
Page(to):
62
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771535 [1566771536]
Language:
English
Call no.:
E23400/962142
Type:
Conference Proceedings

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