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Effect of oxidising ambient on the buried oxide synthesis in low-dose SIMOX wafers

Author(s):
Jablonski, J
Miyanuwa, Y
Mchedlid:e, T R
Saito, M
Katayama, T
Imai, M
Nakashima, S
2 more
Publication title:
Proceedings of the Seventh International Symposium on Silicon-on-Insulator Technology and Devices
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
96-3
Pub. date:
1995
Page(from):
47
Page(to):
52
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771535 [1566771536]
Language:
English
Call no.:
E23400/962142
Type:
Conference Proceedings

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