Blank Cover Image

GaAs Integrated Circuit Process Characterization and Nondestructive Process Monitoring by AFM

Author(s):
Publication title:
Proceedings of the Symposium on Nondestructive Wafer Characterization for Compound Semiconductor Materials and the twenty-second State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXII)
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
95-6
Pub. Year:
1995
Page(from):
63
Page(to):
70
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771009 [1566771005]
Language:
English
Call no.:
E23400/952066
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Complementary GaAs Junction-Gated Heterostructure Field Effect Transistor Fabrication for Integrated Circuits

Baca, A.G., Zolper, J.C., Sherwin, M.E., Robertson, P.J., Shul, R.J., Howard, A.J., Rieger, D.J., Klem, J.F.

Electrochemical Society
7 Conference Proceedings ICP Etching of GaAs Via Hole Contacts

Shul, R.J., Baca, A.G., Briggs, R.D., McClellan, G.B., Pearton, S.J., Constantine, C.

Electrochemical Society
2 Conference Proceedings Ion Implantation Processing for High-Speed GaAs JFETS

Zolper, J.C., Baca, A.G., Sherwin, M.E., Shul, R.J.

Electrochemical Society
8 Conference Proceedings III-Nitride ion implantation and device processing

Zolper, J.C., Shul, R.J., Baca, A.G., Pearton, S.J., Abernathy, C.R., Wilson, R.G., Stall, R.A., Shur, M.

Electrochemical Society
3 Conference Proceedings Dry Etch Development of W/WSi Short Gate MESFETs

Shul, R.J., Sherwin, M.E., Baca, A.G., Zolper, J.C., Rieger, D.J., Briggs, R.D.

Electrochemical Society
9 Conference Proceedings The Role of AlN Encapsulation of GaN During Implant Activation Annealing

Zolper, J.C., Pearton, S.J., Rieger, D.J., Baca, A.G., Lee, J.W., Vartulli, C.R., Stall, R.A.

Electrochemical Society
4 Conference Proceedings GaAs-Based JFET and PHEMT Technologies for Ultra-Low-Power Microwave Circuits Operating at Frequencies up to 2.4 GHz

Baca, A.G., Hietala, V.M., Greenway, D., Zolper, J.C., Sherwin, M.S., Shul, R.J., Hafich, M.J.

Electrochemical Society
10 Conference Proceedings ECR Etching of GaP, GaAs, InP, and InGaAs in Cl2/Ar, Cl2/N2, BCl3/Ar, and BCl3/N2

Shul, R. J., Baca, A. G., Rieger, D. J., Hou, H., Pearton, S. J., Ren, F.

MRS - Materials Research Society
5 Conference Proceedings 0.5 μm E/D AlGaAs/GaAs Heterostructure Field Effect Transistor Technology with DEFT Threshold Adjust Implant

Baca, A.G., Sherwin, M.E., Zolper, J.C., Shul, R.J., Briggs, R.D., Heise, J.A., Robertson, P.J., Hafich, M.F.

Electrochemical Society
11 Conference Proceedings ULTRA-SMOOTH DRY ETCHING OF GaAs USING A HYDROGEN PLASMA PRETREATMENT

Shul, R. J., Choquette, Kent D., Howard, A. J., Rieger, D. J., DiRubio, C. A., Freund, R. S., Wetzel, R. C.

MRS - Materials Research Society
6 Conference Proceedings High-Frequency Operation of 0.3 μm GaAs JFETs for Low-Power Electronics

Zolper, J.C., Baca, A.G., Hietala, V.M., Shul, R.J., Sherwin, M.E.

Electrochemical Society
12 Conference Proceedings Complementary HFET Technology for Wireless Digital and Microwave Applications

Baca, A G., Zolper, J.C., Dubbert, D.F, Hietala, V.M., Sloan, L.R., Shul, R.J., Sherwin, M.E., Hafich, M.J.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12