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Influence Of Vacuum Annealing on Native Si Point Defects

Author(s):
Gossmann, H.-J.
Mogi, T.K.
Rafferty, C.S.
Stolk, P.A.
Eaglesham, D.J.
Luftman, H.S.
Unterwald, F.C.
Boone, T.
Thompson, M.O.
Poate, J.M.
5 more
Publication title:
ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
95-5
Pub. Year:
1995
Page(from):
177
Page(to):
186
Pages:
10
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770996 [1566770998]
Language:
English
Call no.:
E23400/952065
Type:
Conference Proceedings

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