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The Mechanisms of Iron Gettering in Silicon by Boron Ion-Implantation

Author(s):
Benton, J.L.
Stolk, P.A.
Eaglesham, D.J.
Jacobson, D.C.
Cheng, J.Y.
Poate, J.M.
Myers, S.M.
Haynes, T.E
3 more
Publication title:
ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
95-5
Pub. Year:
1995
Page(from):
153
Page(to):
160
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770996 [1566770998]
Language:
English
Call no.:
E23400/952065
Type:
Conference Proceedings

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