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TEOS/Ozone APCVD Thin SiO2 Sub 0.5 mm LDD Spacer Applications

Author(s):
Moinpour, M.
Lu, W.-J.
Sadjadi, R.
Li, J.
Moghadam, F.
Wada, O.
Watt, V.H.C.
2 more
Publication title:
ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
95-5
Pub. Year:
1995
Page(from):
101
Page(to):
108
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770996 [1566770998]
Language:
English
Call no.:
E23400/952065
Type:
Conference Proceedings

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