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Geometry Dependence of Void Formation in Deep Submicron Poly-Buffered Locos Isolation Structures: Experimental Evidence of a Stress-Relaxation Model

Author(s):
Publication title:
ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
95-5
Pub. date:
1995
Page(from):
94
Page(to):
100
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770996 [1566770998]
Language:
English
Call no.:
E23400/952065
Type:
Conference Proceedings

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