Process Modeling and Process Control Needs for Process Synthesis for ULSI Devices

Author(s):

Hosack, H.H.  

Publication title:

ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

95-5

Pub. Year:

1995

Page(from):

1

Page(to):

5

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566770996 [1566770998]

Language:

English

Call no.:

E23400/952065

Type:

Conference Proceedings