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LARGE AREA DIAMOND FILM DEPOSITION FOR MULTICHIP MODULES (MCMS)

Author(s):
Brown, W.D.
Beera, R.
Haque, M.S.
Naseem, H.A.
Bootz, D.
Gordon, M.H.
Malshe, A.P.
2 more
Publication title:
Proceedings of the Fourth International Symposium on Diamond Materials
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
95-4
Pub. Year:
1995
Page(from):
636
Page(to):
642
Pages:
7
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770989 [156677098X]
Language:
English
Call no.:
E23400/952064
Type:
Conference Proceedings

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