DIAMOND DEPOSITION USING A PLANAR RADIO FREQUENCY INDUCTIVELY COUPLED PLASMA
- Author(s):
- Publication title:
- Proceedings of the Fourth International Symposium on Diamond Materials
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 95-4
- Pub. Year:
- 1995
- Page(from):
- 249
- Page(to):
- 254
- Pages:
- 6
- Pub. info.:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770989 [156677098X]
- Language:
- English
- Call no.:
- E23400/952064
- Type:
- Conference Proceedings
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