Blank Cover Image

Modeling of Pulsed-Power Inductively Coupled Plasma Reactors

Author(s):
Publication title:
Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
95-2
Pub. Year:
1995
Page(from):
564
Page(to):
574
Pages:
11
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770965 [1566770963]
Language:
English
Call no.:
E23400/952062
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Modeling Inductively Coupled Plasma Tools with Chlorine Chemistry

Bukowski, J.D., Stewart, R. A., Graves, D.B., Vitello, P.

Electrochemical Society
7 Conference Proceedings Inductively-Coupled Plasma Etching of NiFe and NiFeCo

Jung, K. B., Childress, J. R., Pearton, S. J., Jenson, M., Hurst, A. T., Jr., Johnson, D.

MRS - Materials Research Society
2 Conference Proceedings FLUID DYNAMIC MODELING OF PLASMA REACTORS

Vitello P.

Kluwer Academic Publishers
8 Conference Proceedings A High Density, Pulsed RF Inductively Coupled Reactor for Sub- Half Micron Etch Applications

Ditizio, R.A., Jerde, L.G., Zhang, Y., Meyer, J.A., Zucker, M.L., Mantei, T.

Electrochemical Society
3 Conference Proceedings Etch Induced Damage in High Density Inductively Coupled Plasma Etching Reactor

Zhong, W., Misra, D., Bartynski, R.A., Patel, V., Singh, B.

Electrochemical Society
9 Conference Proceedings Parametric Study of Plasma Uniformity in a Dome-Shaped Inductively Coupled Plasma Reactor

Economou, D.J., Feldsien, J.

Electrochemical Society
4 Conference Proceedings Fluid, Kinitic and Hybrid Simulation Strategies for Modeling Chemically Complex Inductively Coupled Plasmas

Li M., Date H., Graves B. D.

Lenum Press
10 Conference Proceedings Long-Term Evaluation of a Litmas 'Blue' Inductively-Coupled Plasma Device for Point-of-Use PFC and HFC Abatement

Vartanian, V., Beu, L., Stephens, T., Jewett, R., Tonnis, E., Graves, D.

Electrochemical Society
5 Conference Proceedings Modeling and Simulation of Two-Dimensional Reactive Plasma Flow in Inductively Coupled Reactors

Lymberopoulos, D., Wise, R., Economou, D.

Electrochemical Society
11 Conference Proceedings Parametric Study of Compound Semiconductor Etching Utilizing Inductively Coupled Plasma Source

Constantine, C., Johnson, D., Barratt, C., Shul, R. J., McClellan, G. B., Briggs, R. D., Rieger, D. J., Karlicek, R. F., …

MRS - Materials Research Society
6 Conference Proceedings DIAMOND DEPOSITION USING A PLANAR RADIO FREQUENCY INDUCTIVELY COUPLED PLASMA

Bozeman, S.P., Tucker, D.A., Stoner, B.R., Glass, J.T., Hook, W.M.

Electrochemical Society
12 Conference Proceedings Inductively Coupled Plasma Test Reactor Development and Plasma Measurements

Monteiro, M. J. R., Kostryukov, A., Daltrini, A. M., Moshkalyov, S. A., Machida, M., Besseler, E.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12