Blank Cover Image

Characteristics of an Inductively Coupled C12/Ar Plasma and its Application to Cu Etching

Author(s):
Publication title:
Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
95-2
Pub. Year:
1995
Page(from):
327
Page(to):
338
Pages:
12
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566770965 [1566770963]
Language:
English
Call no.:
E23400/952062
Type:
Conference Proceedings

Similar Items:

Kim, H. S., Lee, Y. J., Lee, Y. H., Lee, J. W., Yoo, M. C., Kim, T. I., Yeom, G. Y.

MRS - Materials Research Society

Lee, W., Yang, H., Lee, J.

Electrochemical Society

J.W. Lee, H.W. Kim, J.W. Han, M.S. Kim, B.D. Yoo, M.H. Kim, C.H. Lee, C.H. Lim, S.K. Hwang, C. Lee, D.J. Chung, S.G. …

Trans Tech Publications

Kim,J.-H, Ryu,J.-O., Kim,J.-S., Kim,J.-W., Seol,Y.-S

SPIE-The International Society for Optical Engineering

Kim, J-H., Ryu, J-O., Kim, J-S., Lee, B-C., Kim, J-W., Seol, Y-S.

Electrochemical Society

Wu, X., Zhou, C., Xi, P., Dai, E., Ru, H., Liu, L.

SPIE-The International Society for Optical Engineering

Huang, W.J., Joey Fang, C.V., Wong, J.S., Chang, E.Y., Feng, M.S.

Electrochemical Society

R. Bommena, S. Velicu, P. Boieriu, T. S. Lee, C. H. Grein, K. K. Tedjojuwono

SPIE - The International Society of Optical Engineering

W. Lim, L. Stafford, B. Gila, D. Norton, S. Pearton, F. Ren, J. Song, J. Park, Y. Heo, J. Lee, J. Kim

Electrochemical Society

Constantine, C., Johnson, D., Barratt, C., Shul, R. J., McClellan, G. B., Briggs, R. D., Rieger, D. J., Karlicek, R. F., …

MRS - Materials Research Society

Yoon, S.-Y., Choi, S.-J., Kim, Y.-D., Lee, D.-H., Cha, H.-S., Kim, J.-M., Choi, S.-S., Jeong, S.H.

SPIE-The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12