Integration of germanium waveguide photodetectors for optical intra-chip interconnects

Integration of germanium waveguide photodetectors for optical intra-chip interconnects

Author(s):

Rouviere, M. ( Institut d'Electronique Fondamentale, CNRS (France) and Univ. Paris-Sud (France) and STMicroelectronics (France) )

Halbwax, M. ( Institut d'Electronique Fondamentale, CNRS (France) and Univ. Paris-Sud (France) )

Cercus, J.-L. ( Institut d'Electronique Fondamentale, CNRS (France) and Univ. Paris-Sud (France) )

Cassan, E. ( Institut d'Electronique Fondamentale, CNRS (France) and Univ. Paris-Sud (France) )

Vivien, L. ( Institut d'Electronique Fondamentale, CNRS (France) and Univ. Paris-Sud (France) )

Pascal, D. ( Institut d'Electronique Fondamentale, CNRS (France) and Univ. Paris-Sud (France) )

Heitzmann, M. ( LETI/D2NT/LFE, CEA-Grenoble (France) )

Hartmann, J.-M. ( LETI/D2NT/LFE, CEA-Grenoble (France) )

Bouchier, D. ( Institut d'Electronique Fondamentale, CNRS (France) and Univ. Paris-Sud (France) )

Laval, S. ( Institut d'Electronique Fondamentale, CNRS (France) and Univ. Paris-Sud (France) )

5 more

Publication title:

Micro-optics, VCSELs, and photonic interconnects : 27-29 April 2004, Strasbourg, France

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5453

Pub. Year:

2004

Page(from):

142

Page(to):

149

Pages:

8

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819453761 [0819453765]

Language:

English

Call no.:

P63600/5453

Type:

Conference Proceedings

Details

TDL ID:	ZA00013806
Series ID:	PA00000029
Conf. info. (Name):	Photonics Europe : Micro-Optics, VCSELs, and Photonic Interconnects
Conf. info. (Number):	2004
Conf. info. (Venue):	Strasbourg, France
Conf. info. (Date):	2004.04.27-2004.04.29

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