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Fabrication of photonic integrated circuits by DUV-induced modification of polymers

Author(s):
  • Henzi, P. ( Forschungszentrum Karlsruhe (Germany) )
  • Rabus, D.G. ( Forschungszentrum Karlsruhe (Germany) )
  • Wallrabe, U. ( Forschungszentrum Karlsruhe (Germany) )
  • Mohr, J. ( Forschungszentrum Karlsruhe (Germany) )
Publication title:
Integrated Optics and Photonic Integrated Circuits
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5451
Pub. Year:
2004
Page(from):
24
Page(to):
31
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453747 [0819453749]
Language:
English
Call no.:
P63600/5451
Type:
Conference Proceedings

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