Blank Cover Image

Deep dry etching process development for photonic crystals in InP-based planar waveguides

Author(s):
van der Heijden, R.W. ( Technische Univ. Eindhoven (Netherlands) )
Andriesse, M.S.P. ( Technische Univ. Delft (Netherlands) )
Carlstrom, C.-F. ( Technische Univ. Eindhoven (Netherlands) )
van der Drift, E. ( Technische Univ. Delft (Netherlands) )
Geluk, E.-J. ( Technische Univ. Eindhoven (Netherlands) )
Karouta, A.F. ( Technische Univ. Eindhoven (Netherlands) )
Nouwens, P.A. ( Technische Univ. Eindhoven (Netherlands) )
Oei, Y.S. ( Technische Univ. Eindhoven (Netherlands) )
de Vries, T. ( Technische Univ. Eindhoven (Netherlands) )
Salemink, H.W.M. ( Technische Univ. Eindhoven (Netherlands) )
5 more
Publication title:
Photonic Crystal Materials and Nanostructures
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5450
Pub. Year:
2004
Page(from):
523
Page(to):
532
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453730 [0819453730]
Language:
English
Call no.:
P63600/5450
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings InP-based planar photonic crystals infiltrated with solid polymers and liquid crystals [6322-05]

van der Heijden R., Kjellander C., Carlstrom C., Snijders J., Kicken H., van der Heijden R. W., Bastiaansen C., Broer …

SPIE - The International Society of Optical Engineering
7 Conference Proceedings The impact of metallic contacts on propagation losses of an underlying photonic crystal waveguide

P. Kaspar, R. Kappeler, F. Karouta, F. Robin, P. Strasser

Society of Photo-optical Instrumentation Engineers
2 Conference Proceedings Two-dimensional photonic crystals from semiconductor material with polymer filled holes [6182-31]

Van der Heijden, R., Kjellander, C., Carlstrom, C. -F., Snijders, J., Van der Heijden, R. W., Bastiaansen, K., Broer, …

SPIE - The International Society of Optical Engineering
8 Conference Proceedings 1.55 µm extremely efficient and polarization insensitive tunable Mach-Zehnder wavelength duplexer based on an InGaAsP/InP ridge waveguide structure (Best …

L. Xu, X. J. M. Leijtens, M. J. H. Sander-Jochem, T. de Vries, Y. S. Oei

Society of Photo-optical Instrumentation Engineers
3 Conference Proceedings ICP etching of InP and its applications in photonic circuits

Karouta, F., Zhu, Y.C., Geluk, E.J., van der Tol, J.J.G.M., Binsma, J.J.M., Smit, M.K.

SPIE - The International Society of Optical Engineering
9 Conference Proceedings IN-SITU dry etching of InP using phosphorus tri-chloride and re-growth inside a chemical beam epitaxial growth chamber

Kapre, R. M., Tsang, W. T., Sciortino, P. F., Jr.

MRS - Materials Research Society
4 Conference Proceedings 2D InP photonic cyrstal fabrication process development [6327-49]

Rong, B., van der Drift, E., van der Heijden, R. W., Salemink, H. W. M.

SPIE - The International Society of Optical Engineering
10 Conference Proceedings Magnetron dry etching for photonic device fabrication

Arnot, H. E. G., Zappe, H. P., Epler, J. E., Graf, B., Widmer, R., Lehmann, H. W.

MRS - Materials Research Society
5 Conference Proceedings Photonic Crystal Properties Of Sion (N=1.56)

Aarts, Igor M.P., Heijden, Rob W. v.d., Salemink, Huub W.M.

Materials Research Society
11 Conference Proceedings Chemical Identification of the Atomic Scale in MBE-Grown III-V Alloy Semiconductors

Koenraad,P.M., Johnson,M.B., Pfister,M., Salemink,H.W.M.

Trans Tech Publications
6 Conference Proceedings Silicon-Oxynitride Layers For Optical Waveguide Applications

Germann, R., Salemink, H.W.M., Beyeler, R., Bona, G.L., Horst, F., Massarek, I., Offrein, B.J.

Electrochemical Society
12 Conference Proceedings Planar waveguide structures created by PLD

Jelinek,M., Laneok,J., Sonsky,J., Jastrabik,L., Grivas,C., Fotakis,C., Anderson,A.A., Eason,R.W., Flory,F.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12