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FET on ultrathin SOI (fabrication and research)

Author(s):
Naumova, O.V. ( Institute of Semiconductor Physics (Russia) )
Antonova, I.V. ( Institute of Semiconductor Physics (Russia) )
Popov, V.P. ( Institute of Semiconductor Physics (Russia) )
Nastaushev, Y.V. ( Institute of Semiconductor Physics (Russia) )
Gavrilova, T.A. ( Institute of Semiconductor Physics (Russia) )
Kachanova, M.M. ( Institute of Semiconductor Physics (Russia) )
Litvin, L.V. ( Institute of Semiconductor Physics (Russia) )
Aseev, A.L. ( Institute of Semiconductor Physics (Russia) )
3 more
Publication title:
Micro- and Nanoelectronics 2003
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5401
Pub. date:
2004
Page(from):
323
Page(to):
331
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453242 [0819453242]
Language:
English
Call no.:
P63600/5401
Type:
Conference Proceedings

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