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Lithographic fabrication of microstructures by laser ablation using femtosecond laser

Author(s):
Publication title:
Laser-Assisted Micro- and Nanotechnologies 2003
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5399
Pub. Year:
2004
Page(from):
147
Page(to):
155
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453228 [0819453226]
Language:
English
Call no.:
P63600/5399
Type:
Conference Proceedings

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