Interferometers with diffraction on dot aperture for testing of shape errors of precise surfaces
- Author(s):
- Kirillovsky, V.K. ( St. Petersburg State Institute of Fine Mechanics and Optics (Russia) )
- Voznesensky, N.B. ( St. Petersburg State Institute of Fine Mechanics and Optics (Russia) )
- Troukhine, M.M. ( St. Petersburg State Institute of Fine Mechanics and Optics (Russia) )
- Lee, K.-H. ( Korea Electrotechnology Research Institute (South Korea) )
- Publication title:
- Laser-Assisted Micro- and Nanotechnologies 2003
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5399
- Pub. Year:
- 2004
- Page(from):
- 77
- Page(to):
- 87
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819453228 [0819453226]
- Language:
- English
- Call no.:
- P63600/5399
- Type:
- Conference Proceedings
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