Design and test of a microfabricated SU-8 optical scanner
- Author(s):
- Wang, W.-C. ( Univ. of Washington (USA) )
- Panergo, R.R. ( Univ. of Washington (USA) )
- Publication title:
- Health monitoring and smart nondestructive evaluation of structural and biological systems III : 15-17 March 2004, San Diego, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5394
- Pub. Year:
- 2004
- Page(from):
- 280
- Page(to):
- 287
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819453112 [0819453110]
- Language:
- English
- Call no.:
- P63600/5394
- Type:
- Conference Proceedings
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