Differential laterally movable gate FETs (LMGFETs) as a position sensor
- Author(s):
- Song, I.-H. ( Louisiana State Univ. (USA) )
- Ajmera, P.K. ( Louisiana State Univ. (USA) )
- Publication title:
- Smart structures and materials 2004 : smart electronics, MEMS, BioMEMS, and nanotechnology : 15-18 March 2004, San Diego, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5389
- Pub. Year:
- 2004
- Page(from):
- 267
- Page(to):
- 273
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819453068 [0819453064]
- Language:
- English
- Call no.:
- P63600/5389
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Laterally movable gate FET (LMGFET) for on-chip integration of MEMS with electronics
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Digital-readout CMOS design for capacitive sensors using on-chip variable sense capacitor arrays
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Readout electronics scheme in CMOS technology for integration with analog outputs from integrated smart sensors
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
Laterally Movable Gate Field Effect Transistor (LMGFET) for Microsensor and Microactuator Applications
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
4
Conference Proceedings
Design, simulation, and fabrication of a novel integrated microaccelerometer utilizing a post-CMOS fabrication technique
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
Low Temperature Plasma Enhanced Chemical Vapour Deposition of Silicon Nitride and Oxynitride Layers
Narosa Publishing House |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
6
Conference Proceedings
Integrated Accelerated Sensors Compatible with the Standard CMOS Fabrication Process
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
0.8V ultralow-power CMOS analog multiplexer for remote biological and chemical signal processing
SPIE - The International Society of Optical Engineering |